| 20 mm | 100-PQFP | 14 mm | 160 KB | 8 bit | 160 K | 100-BQFP | ARM® Cortex®-M3 | CSIO EBI EMI I2C UART USART USB | 12 bit | 24 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 83 | Surface Mount | Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | Single-Core | |
| 6 mm | 96-FBGA | 6 mm | 160 KB | 8 bit | 160 K | 96-LFBGA | ARM® Cortex®-M3 | CSIO EBI EMI I2C UART USART USB | 12 bit | 17 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 66 | Surface Mount | External Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | | SAR |
| 12 mm | 80-LQFP | 12 mm | 160 KB | 8 bit | 160 K | 80-LQFP | ARM® Cortex®-M3 | CSIO EBI EMI I2C UART USART USB | 12 bit | 17 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 66 | Surface Mount | Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | Single-Core | |
| 14 mm | 100-LQFP | 14 mm | 160 KB | 8 bit | 160 K | 100-LQFP | ARM® Cortex®-M3 | CSIO EBI EMI I2C UART USART USB | 12 bit | 24 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 83 | Surface Mount | Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | Single-Core | |
| 9 mm | 64-QFN | 9 mm | 160 KB | 8 bit | 160 K | 64-VFQFN Exposed Pad | ARM® Cortex®-M3 | CSIO I2C UART USART USB | 12 bit | 12 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 51 | Surface Mount | Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | Single-Core | |
| 12 mm | 64-LQFP | 12 mm | 160 KB | 8 bit | 160 K | 64-LQFP | ARM® Cortex®-M3 | CSIO I2C UART USART USB | 12 bit | 12 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 51 | Surface Mount | Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | Single-Core | |
| 12 mm | 64-LQFP | 12 mm | 160 KB | 8 bit | 160 K | 64-LQFP | ARM® Cortex®-M3 | CSIO I2C UART USART USB | 12 bit | 12 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 51 | Surface Mount | External Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | | SAR |
| 10 mm | 112-PFBGA | 10 mm | 160 KB | 8 bit | 160 K | 112-LFBGA | ARM® Cortex®-M3 | CSIO EBI EMI I2C UART USART USB | 12 bit | 24 count | 32 Bit | DMA LVD POR PWM WDT | 3.6 V | 1.65 V | 83 | Surface Mount | External Internal | FLASH | 85 °C | -40 °C | 40 MHz | 8 bit | 16 K | | SAR |