| AVR | 128 K | Brown-out Detect/Reset, DMA, POR, WDT | Surface Mount | 100-VFBGA (7x7) | Internal | EBI/EMI, I2C, IrDA, Memory Card, SPI, SSC, UART/USART, USB OTG | 88 | 1.75 V | 3.6 V | 100-VFBGA | 32-Bit Single-Core | 8 | 10 | FLASH | 66 MHz | 85 °C | -40 °C | 128 KB | | |
| AVR | | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 48-TQFP (7x7) | Internal | I2C, SPI, UART/USART | 36 | 1.62 V | 3.6 V | 48-TQFP | 32-Bit Single-Core | 8 | 12 b | FLASH | 50 MHz | 85 °C | -40 °C | 256 KB | | |
| AVR | | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 48-QFN (7x7) | Internal | I2C, SPI, UART/USART | 36 | 1.62 V | 3.6 V | 48-VFQFN Exposed Pad | 32-Bit Single-Core | 8 | 12 b | FLASH | 50 MHz | 85 °C | -40 °C | 128 KB | | |
| AVR | | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 48-TLLGA (5.5x5.5) | Internal | I2C, SPI, UART/USART | 36 | 1.62 V | 3.6 V | 48-UFLGA Exposed Pad | 32-Bit Single-Core | 8 | 12 b | FLASH | 50 MHz | 85 °C | -40 °C | 128 KB | | |
| AVR | 16 K | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 48-QFN (7x7) | Internal | I2C, IrDA, SPI, SSC, UART/USART, USB | 28 | 1.65 V | 3.6 V | 48-VFQFN Exposed Pad | 32-Bit Single-Core | 6 | | FLASH | 60 MHz | 85 °C | -40 °C | 64 KB | 10 b | |
| AVR | | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 48-QFN (7x7) | Internal | I2C, SPI, UART/USART | 36 | 1.62 V | 3.6 V | 48-VFQFN Exposed Pad | 32-Bit Single-Core | 8 | 12 b | FLASH | 50 MHz | 85 °C | -40 °C | 256 KB | | |
| AVR | | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 64-QFN (9x9) | Internal | I2C, IrDA, SPI, SSC, UART/USART, USB | 44 | 1.65 V | 3.6 V | 64-VFQFN Exposed Pad | 32-Bit Single-Core | 8 | 10 | FLASH | 60 MHz | 85 °C | -40 °C | 128 KB | | |
| AVR | | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 64-QFN (9x9) | Internal | I2C, IrDA, SPI, SSC, UART/USART, USB | 44 | 1.65 V | 3.6 V | 64-VFQFN Exposed Pad | 32-Bit Single-Core | 8 | 10 | FLASH | 60 MHz | 85 °C | -40 °C | 128 KB | | |
| AVR | 16 K | Brown-out Detect/Reset, DMA, POR, PWM, WDT | Surface Mount | 48-QFN (7x7) | Internal | I2C, IrDA, SPI, SSC, UART/USART, USB | 28 | 1.65 V | 3.6 V | 48-VFQFN Exposed Pad | 32-Bit Single-Core | 6 | | FLASH | 60 MHz | 85 °C | -40 °C | 64 KB | 10 b | |
| AVR | | | Surface Mount | 100-TQFP (14x14) | Internal | Ethernet, I2C, SPI, SSC, UART/USART, USB OTG | 69 | 1.65 V | 3.6 V | 100-TQFP | 32-Bit Single-Core | 8 | 10 | FLASH | 66 MHz | 85 °C | -40 °C | 128 KB | | |