| 8 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 1.8 V | 5.5 V | 9 mm | 64-QFN | 9 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-VFQFN Exposed Pad | 85 °C | -40 °C | 53 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 8 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 1.8 V | 5.5 V | 9 mm | 64-QFN | 9 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-VFQFN Exposed Pad | 85 °C | -40 °C | 53 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 8 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 1.8 V | 5.5 V | 14 mm | 64-TQFP | 14 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-TQFP | 85 °C | -40 °C | 53 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 16 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 2.7 V | 5.5 V | 14 mm | 64-TQFP | 14 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-TQFP | 85 °C | -40 °C | 53 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 16 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 2.7 V | 5.5 V | 9 mm | 64-QFN | 9 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-VFQFN Exposed Pad | 85 °C | -40 °C | 53 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 16 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 1.8 V | 5.5 V | 9 mm | 64-QFN | 9 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-VFQFN Exposed Pad | 85 °C | -40 °C | 54 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 16 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 1.8 V | 5.5 V | 9 mm | 64-QFN | 9 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-VFQFN Exposed Pad | 85 °C | -40 °C | 54 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 8 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 1.8 V | 5.5 V | 14 mm | 64-TQFP | 14 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-TQFP | 85 °C | -40 °C | 53 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 16 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 2.7 V | 5.5 V | 14 mm | 64-TQFP | 14 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-TQFP | 85 °C | -40 °C | 53 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |
| 16 MHz | 32 K | 64KB | 16 | 64 KB | 2 K | 8 bit | FLASH | 1.8 V | 5.5 V | 14 mm | 64-TQFP | 14 mm | SPI UART USART USI | Brown-out Detect POR PWM Reset WDT | Surface Mount | 64-TQFP | 85 °C | -40 °C | 54 | AVR | 8 count | 10 bit | 4 K | 8 bit | Internal | 8 Bit |